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LPS-DF250
Laser Scriber
Laser, Power supply, X-Y-Z-R stage,
Vision system, System control S/W
 
Model LPS-DF250
Wavelength 266 nm
Pulse repetition rate Single shot to 100㎑
Power ≥ 3W @30kHz
Pulse stability < 5 % rms up to 30kHz
Beam divergence < 0.3 mrad
Cooling Closed loop
Demension 1600mm(W) x 1500mm(L) x 1700mm(H)
Weight 1500kg
Electricity 220V, 3PH
Vision FOV : 1.4 x 1.9 (mm)

 

- High precision optics and optimized processing system

- Si Sapphire scribing

- Scribing broken wafer

- Alignment by X-Y-Z-R stages and vision

- applied to dxf file