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 HOME > Products > Semiconductor
LPD-EK500
Excimer Micro Processing System
KrF (ArF) Excimer Laser
High precision optics, X-Y-Z stage
 
Model     LPD-EK500 
Laser type     KrF (ArF)
Wave length    248 mm (193 nm)
Average power    10 W
Pulse energy    10 mJ @ 1000 Hz
Pulse width    10 ~ 25 nsec
Pulse stability    ±3 %
Cooling     water 
X-Y stroke    500 mm x 500 mm
Accuracy    ±4 ㎛
Repeatability    ±2 ㎛
Dimension    1750 mm(W) x 1500 mm(D) x 1850 mm(H)

- High precision micro processing system by excimer laser

- High power stability by new gas circulation system

- User friendly GUI with touch screen

- Drilling, Patterning etc